Simulation Model to Control Risk Levels on Process Equipment Through Metrology in Semiconductor Manufacturing Alejandro Sendón, Stéphane Dauzère-Pérès, Jacques Pinaton

This paper first presents a simulation model implemented to study a specific workcenter in semiconductor manufacturing facilities (fabs) with the objective of controlling the risk on process equipment. The different components of the model, its inputs and its outputs, that led us to propose improvements in the workcenter, are explained. The risk evaluated in this study is the exposure level in the number of wafers on a process tool since the latest control performed for this tool, based on an indicator called Wafer at Risk. Our analysis shows that measures should be better managed to avoid lack of control and that an appropriate qualification strategy is required.
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Towards a Virtual Factory Prototype Sanjay Jain, David Lechevalier

A virtual factory should represent most of the features and operations of the corresponding real factory. Some of the key features of the virtual factory include the ability to assess performance at multiple resolutions and generate analytics data similar to that possible in a real factory. One should be able to look at the overall factory performance and be able to drill down to a machine and analyze its performance. It will require a large amount of effort and expertise to build such a virtual factory. This paper describes an effort to build a multiple resolution model of a manufacturing cell. The model provides the ability to study the performance at the cell level or at the machine level. The benefits and limitations of the presented approach and future research directions are also described.
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Hybrid Simulation of Production Process of Pupunha Palm José Arnaldo Barra Montevechi, Elisa Maria Melo Silva et al

This work simulated some alternatives of dynamic allocation of additional human resources in a company that produces various products from Pupunha palm. Its goal was to increase the average amount of trays produced per day in this line through a hybrid application of discrete event and agent-based simulation. Two different decision-making forms were proposed to find out which workstation should have received an additional operator. The first proposal was made on the level of occupancy of the operators, while the second one was made on the queue size. The computational model was operationally validated by comparing its results with the actual production data of the company.
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